Operating Principle
Mechanical deformation of a flexible diaphragm under applied force alters the electrical capacitance between that diaphragm and a fixed electrode. Utilizing a capacitive pressure transducer allows for highly accurate measurements of both absolute and differential pressure in fluid systems. The resulting change in capacitance is converted by integrated electronics into a proportional electrical output such as a voltage or a frequency.
Sensor Construction
The structure typically consists of a ceramic or silicon diaphragm exposed to the process media and a rigid substrate. This design provides effective mechanical isolation and protects the active electrical elements from corrosive process fluids.
Signal Conditioning
Internal circuitry converts the small capacitive shifts, often in the picofarad range, into clear industrial signals. High frequency excitation minimizes the susceptibility to electromagnetic interference and improves the response time of the instrument.
Performance Limitation
Temperature changes present the primary source of drift in these sensing systems due to the thermal expansion of the structural materials. Compressing the gas within the reference cavity can also introduce minor non-linearities that require compensation during the calibration phase. Sensor manufacturers address this by integrating dedicated temperature sensors next to the capacitive element to apply real-time mathematical corrections to the output.