Structural Deformation
Micro-electromechanical system packaging specifications document internal structural deformations that alter sensor element baseline output. MEMS cavity strain measures the mechanical deformation of capped silicon structures induced by die attach adhesives and package molding compounds. Piezoresistive bridge circuits and optical interferometers measure strain distributions across the active diaphragm.
The analytical scope excludes strain resulting from external force applications beyond package boundaries.
Stress Contraction
Differential thermal expansion between silicon substrates and organic package materials generates mechanical stress. Cure shrinkage in die attach epoxy deforms the thin silicon membrane surrounding the cavity. Moisture absorption in plastic encapsulation causes swelling that shifts sensor zero-offset values.
Temperature cycling amplifies stress hysteresis across the internal chamber walls.
Strain Measurement
Laser Doppler vibrometers and piezoresistive test structures quantify diaphragm deflection during package environmental testing. Wafer-level calibration steps establish baseline offset values prior to plastic encapsulation. Thermal stress relaxation introduces long-term zero drift in precision pressure sensors.
Mold compound filler particles induce localized stress concentrations on micro-machined cavity walls. Calibration certificates detail hysteresis limits across the full operating temperature envelope.
Mechanical Limit
Package design tolerances restrict total die strain to prevent offset shift beyond zero-point calibration limits. Assembly engineers qualify low-stress potting compounds to preserve sensor accuracy. Excessive cavity strain fractures micro-machined silicon diaphragms during thermal shock testing.