
Thermal Expansion Mismatch Strain Mitigation in Reactive Sputtered Sensor Layering
Compositionally graded compliant interlayers and post-sputter thermal anneals eliminate residual thermal strain, preventing zero-drift in sputtered thin-film sensors.

Compositionally graded compliant interlayers and post-sputter thermal anneals eliminate residual thermal strain, preventing zero-drift in sputtered thin-film sensors.

Substrate CTE mismatch drives interfacial shear strain into current shunt alloys, causing piezoresistive thermal hysteresis that requires post-cure thermal cycling to stabilize.
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