Folded Geometry
Meandered spring arms integrated into MEMS sensor frames provide low mechanical stiffness within compact die footprints. Accelerometer designers incorporate the serpentine suspension to suspend central proof masses from rigid silicon substrates. Repeating folded beam segments distribute mechanical bending stress along multiple parallel segments, increasing maximum allowable travel without yield.
Etch profile variations during deep reactive ion etching alter beam width tolerances and mechanical spring constants. Resonance testing validates structural compliance across operational vibration frequencies.
Stiffness Reduction
Folded beam geometries lower the effective spring constant along the primary motion axis while maintaining high lateral rigidity. Adding folded turns to the serpentine suspension increases mechanical compliance proportionally without extending overall spring length. Torsional modes remain suppressed when orthogonal beam segments maintain symmetric cross-sections.
Nonlinear spring behavior emerges at displacements exceeding ten percent of total beam length.
Out-of-Plane Deflection
Cross-axis sensitivity arises when vertical forces deflect the suspended structure out of the primary sensing plane. The geometric aspect ratio of the serpentine suspension dictates the ratio of lateral stiffness to out-of-plane stiffness. Deep silicon etching maintains high aspect ratio vertical walls to minimize cross-axis displacement.
Fatigue Resistance
Cyclic acceleration stresses concentrate at the inner radius of folded beam corners. Fillet radius design at turn junctions reduces local stress concentrations, extending fatigue life under continuous vibration.